Equipment Name
Location
Contact Window
E-beam Lithography (EBL)📎
CRE 2F Cleanroom
Advanced Lithography Area
Dr. Chia-Yang Tsai
I-Line Stepper (is being installed)
Dr. Chih-Hao Chiang
Plasma-Enhanced Atomic Layer Deposition System (PEALD) 📎
CVD Area
Thermal Atomic Layer Deposition System (Thermal ALD)📎
Inductively Coupled Plasma-Chemical Vapor System (ICPCVD)📎
UHV Sputter📎
PVD Area
UHV E-Beam Evaporator📎
Inductively Coupled Plasma-Reactive Ion Etching System (ALE)📎
Dry Etch Area
Semiconductor Device Parameter Analyzer 📎
Measurement & Analysis Area