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Equipment Name
|
Location
|
Contact Window
|
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Plasma-Enhanced Atomic Layer Deposition System (PEALD) 📎
|
CRE 2F Cleanroom
CVD Area
|
Dr. Chia-Yang Tsai
|
|
Thermal Atomic Layer Deposition System (Thermal ALD)📎
|
CRE 2F Cleanroom
CVD Area
|
Dr. Chia-Yang Tsai
|
|
Plasma-Enhanced Chemical Vapor Deposition System (PECVD)📎
|
CRE 2F Cleanroom
CVD Area
|
Dr. Chia-Yang Tsai
|
|
UHV Sputter📎
|
CRE 2F Cleanroom
PVD Area
|
Dr. Chih-Hao Chiang
|
|
UHV E-Beam Evaporator📎
|
CRE 2F Cleanroom
PVD Area
|
Dr. Chih-Hao Chiang
|