Equipment Usage Fee Table
Ø Academic Institutions
Self-Operation：Fees are charged based on the academic pricing listed in the table below. (NTU internal users are eligible for an additional 20% discount.)
OEM Service：Fees are charged based on the academic pricing listed in the table below, plus an operator service fee of NT$500 per 30 minutes. (NTU internal clients are eligible for an additional 20% discount.)
Ø Commercial Organizations
Self-Operation：Fees are charged based on the commercial pricing listed in the table below.
OEM Service：Fees are charged based on the commercial pricing listed in the table below, plus an operator service fee of NT$1,500 per 30 minutes.
📘 Photolithography
|
Equipment
|
Academic Rate
|
Commercial Rate
|
Remarks
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E-beam Lithography (EBL)
|
NT$1,080 / 30 min
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NT$5,040 / 30 min
|
|
📘 Thin Film Deposition
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Equipment
|
Academic Rate
|
Commercial Rate
|
Remarks
|
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Plasma-Enhanced Atomic Layer Deposition System (PEALD)
|
NT$560 / 30 min
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NT$2,800 / 30 min
|
Additional charges apply for materials
TMA: NT$5 /cycle
TDMAHf: NT$5/cycle
|
|
Thermal Atomic Layer Deposition System (Thermal ALD)
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NT$200 / 30 min
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NT$1,000 / 30 min
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Additional charges apply for materials
TMA: NT$5 /cycle
TDMAHf: NT$5/cycle
|
|
Inductively Coupled Plasma-Chemical Vapor Deposition System (ICPCVD)
|
NT$900 / 30 min
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NT$4,500 / 30 min
|
|
|
UHV Sputter
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NT$1,500 / 30 min
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NT$7,500 / 30 min
|
|
|
UHV E-Beam Evaporator
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NT$1,650 / 30 min
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NT$8,250 / 30 min
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Precious metal material fees are charged separately.
|
📘 Dry Etching
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Equipment
|
Academic Rate
|
Commercial Rate
|
Remarks
|
|
Inductively Coupled Plasma-Reactive Ion Etching System (ALE)
|
NT$900 / 30 min
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NT$4,500 / 30 min
|
|
📘 Measurement & Analysis
|
Equipment
|
Academic Rate
|
Commercial Rate
|
Remarks
|
|
Semiconductor Device Parameter Analyzer
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NT$110 / 30 min
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NT$550 / 30 min
|
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Note: The fee standards may be revised due to factors such as changes in costs or adjustments in maintenance expenses. Any revisions will be approved through the appropriate procedures and announced separately on our center's website