National Taiwan University Graduate School of Advanced Technology
Regulations Governing Instrument and Equipment Management of the Center for Semiconductor Processing and Systems Research
Approved by the College Affairs Meeting on March 24, 2026
Approved by the National Taiwan University Administrative Meeting on May 12, 2026
1. To effectively manage the instruments and equipment of the Semiconductor Processing and Systems Research Center (hereinafter referred to as the “Center”) under the Graduate School of Advanced Technology (hereinafter referred to as the “College”) of National Taiwan University (hereinafter referred to as the “University”), enhance utilization efficiency, maintain operational quality and safety, and in accordance with the National Taiwan University Regulations Governing Revenue and Expenditure Management for Facilities and Equipment, these Regulations are hereby established.
2. The Center’s training courses, qualification procedures, equipment usage, foundry services, material and consumable charges, and related management requirements shall be governed by these Regulations and the attached schedules.
3. The Center’s instruments and equipment are available for use by personnel from academic institutions and for-profit organizations.
4. The Center provides foundry services, whereby designated personnel of the Center operate relevant instruments and produce the requested results.
Applicants wishing to use the Center’s equipment shall submit applications in accordance with the procedures announced by the Center and shall complete and pass the designated training courses and qualification examinations. Approval from the Center must be obtained before any equipment may be used.
After submitting an application, applicants shall pay the required training and qualification fees within the designated period specified by the Center. Applications shall not be approved if the applicant fails to pay the fees on time, fails to complete the training course, or fails to pass the qualification examination.
Approved users shall reserve equipment usage time slots in accordance with the procedures announced by the Center and shall pay the applicable usage fees within the period specified by the Center after completion of use.
Fees already paid shall not be refunded for no-shows or failure to use the equipment during the reserved time period.
5. Any cancellation or modification of an equipment reservation shall be submitted by the applicant at least three (3) days prior to the originally scheduled usage time and shall be subject to approval by the Center.
Any cancellation of registration for a training course or qualification examination shall be submitted at least three (3) days prior to the commencement date and shall be subject to approval by the Center.
Such cancellations or modifications shall be processed in accordance with procedures announced by the Center.
Fees already paid shall not be refunded if cancellation or modification is not completed within the prescribed period; however, this restriction shall not apply in cases of force majeure.
6. Persons commissioning foundry services from the Center shall pay the full service fee within the period specified by the Center. The Center shall not perform the requested services if payment is not made by the deadline.
If the foundry service cannot be completed due to equipment limitations or other factors attributable to the Center, the client may apply for a refund in accordance with applicable regulations.
7. If an applicant or user commits any of the following acts, the Center may suspend or restrict the user’s access depending on the severity of the circumstances and may further restrict or reject future applications. Unless otherwise provided, fees already paid may be non-refundable:
(1) The intended use or method of use violates applicable laws or regulations, or may endanger personnel, facilities, or equipment.
(2) The use may damage equipment, affect system operations, or cause environmental contamination.
(3) The actual use differs from the approved application, or the user transfers, lends, or permits others to use the approved qualifications, reservations, or access rights.
(4) Failure to pay required fees within the prescribed period or submission of false information in an application.
(5) Serious or repeated violations of regulations or management measures announced by the University or the Center.
(6) Other circumstances deemed inappropriate for continued use by the Center.
8. Where equipment usage schedules must be adjusted or canceled due to maintenance, calibration, malfunction, or other necessary circumstances, the Center may notify the applicant in advance and arrange postponement or refunds as appropriate.
9. Applicants and users shall operate equipment in accordance with applicable regulations and shall be responsible for maintaining the safety of equipment, facilities, and the environment.
10. To ensure the sustainable operation of the Center’s cleanroom facilities and maintain the safety of personnel, equipment, and the research environment, users shall comply with these Regulations and all related announcements. Violations may result in suspension or restriction of usage rights depending on the severity of the circumstances. Users shall be liable for any damage caused to instruments, equipment, chemicals, or the environment.
Users shall comply with the following requirements:
(1) Equipment shall be operated in accordance with standard operating procedures, and unauthorized modification of parameters is prohibited.
(2) Cleanroom and chemical management regulations shall be observed.
(3) Equipment shall not be moved, disassembled, or modified without authorization.
(4) Without approval from the University Semiconductor Key Equipment Procurement and Management Committee, no non-Center-owned equipment or devices may be brought into, installed, or placed within the cleanroom.
(5) Access cards shall not be lent to others, nor shall another person's access card be used.
(6) No person may be brought into the cleanroom without prior notification to and approval from Center personnel.
(7) Emergency facilities or equipment shall not be used except in emergencies.
(8) Experimental instruments or chemicals may not be brought into laboratories without prior approval.
(9) Equipment damage or abnormal conditions shall be reported immediately to Center personnel.
(10) Equipment, instruments, or cleanroom garments shall not be removed from the cleanroom.
(11) Required equipment and access-control card records shall be properly completed.
(12) During nighttime hours (12:00 a.m. to 6:00 a.m.), at least two persons must enter and leave the cleanroom together.
Users who violate Subparagraphs 5 or 6 above may have their usage privileges suspended for two (2) weeks and shall be prohibited from entering the cleanroom during the suspension period.
Users who violate any of the other provisions above may be subject to the following measures, without compensation or refund:
(1) First violation: suspension of usage privileges for one (1) week.
(2) Second violation: suspension of usage privileges for two (2) weeks.
(3) Third and subsequent violations: suspension of usage privileges for one (1) month per violation.
(4) For other serious violations as determined by the Center, or violations that may endanger personal safety or pose significant equipment risks, the Center may immediately terminate usage privileges and may permanently refuse future applications.
11. Revenue and expenditure generated from equipment usage shall be managed in accordance with the National Taiwan University Regulations Governing Revenue and Expenditure Management for Facilities and Equipment. Administrative management fees shall be allocated according to the prescribed percentage and utilized by the University.
12. These Regulations shall take effect upon approval by the College Affairs Meeting and the University Administrative Meeting and promulgation by the University.