Training & Certification Charges Standards
Ø Course Notes:
The table below shows the monthly course fees scheduled by the Semiconductor Process and Systems Research Center.
The fee for an additional (extra) class is twice the original price.
The number of participants must meet the minimum enrollment requirement.
📘 Photolithography
|
Equipment
|
Academic
|
Commercial
|
Minimum number of participants
|
|
Training
|
Certification
|
Training
|
Certification
|
|
E-beam Lithography (EBL)
|
NT$1,500
*Practice: NT$1,500
|
NT$1,500
|
NT3,000
*Practice: NT$3,000
|
NT3,000
|
3–6 people
|
|
I-Line Stepper
|
NT$1,500
*Practice: NT$1,500
|
NT$1,500
|
NT3,000
*Practice: NT$3,000
|
NT3,000
|
3–6 people
|
📘 Thin Film Deposition
|
Equipment
|
Academic
|
Commercial
|
Minimum number of participants
|
|
Training
|
Certification
|
Training
|
Certification
|
|
Plasma-Enhanced Atomic Layer Deposition System (PEALD)
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
|
Thermal Atomic Layer Deposition System (Thermal ALD)
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
|
Plasma-Enhanced Chemical Vapor Deposition System (PECVD)
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
|
UHV Sputter
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
|
UHV E-Beam Evaporator
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
📘 Dry Etching
|
Equipment
|
Academic
|
Commercial
|
Minimum number of participants
|
|
Training
|
Certification
|
Training
|
Certification
|
|
Inductively Coupled Plasma-Reactive Ion Etching System (ICP-RIE)
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|
📘 Measurement & Analysis
|
Equipment
|
Academic
|
Commercial
|
Minimum number of participants
|
|
Training
|
Certification
|
Training
|
Certification
|
|
Semiconductor Device Parameter Analyzer
|
NT$1,500
|
NT$1,500
|
NT3,000
|
NT3,000
|
3–6 people
|