半導體中心-英文

🏭 Brand / Model
Semiconductor Parameter Analyzer: Keysight / B1500A
Vacuum Probe Station: Pomme Technology / MF-P2000LNT

⚙️ Equipment Purpose / Key Features
This system is designed for precise electrical characterization of semiconductor devices. It enables detailed analysis of device performance under various process conditions, offering high-accuracy I–V and C–V measurements. The setup supports low-current, high-voltage, and multi-frequency capacitance tests, with rapid switching between different measurement modes.

📊 Technical Specifications

• Maximum Supported Sample Size: Samples with 8-inch diameter
• Probes and Probe Holders: 4 adjustable probe arms
• XYZ Travel Range: X > 100 mm, Y > 50 mm, Z > 25 mm
• Microscope Magnification: 0.75×–5×
• Environment: Dark enclosure, vibration isolation table
• Measurement Frequency Range: 1 kHz to 5 MHz
• Voltage/Current Output Range: Up to 200 V / 1 A
• Resolution: Better than 0.1 fA / 0.5 µV
• Modules Installed:
  1. 2 × HRSMU (High-Resolution Source/Measure Unit)
  2. 1 × HPSMU (High-Power Source/Measure Unit)
  3. 1 × MPSMU (Medium-Power Source/Measure Unit)
  4. 1 × MFCMU (Multi-Frequency Capacitance Measurement Unit)
  5. 1 × WGFMU (Waveform Generator / Fast Measurement Unit)
  6. 1 × HV-SPGU (High Voltage Semiconductor Pulse Generator Unit)
  7. 1 × SCUU (Switch Control Unit)

🔬 Applications

• Electrical parameter characterization of electronic or semiconductor devices (e.g., I–V, C–V)
• Fast pulse or dynamic I–V measurements
• Multi-frequency capacitance/voltage testing using the MFCMU module and efficient automated IV/CV switching with the SCUU module

📍 Location
Measurement Area, Cleanroom, 2F, Excellence Research Building, Shuiyuan Campus, National Taiwan University

📞 Contact / Reservation
Manager: Dr. Chih-Hao Chiang
Reservation: Please book through the “Chip Driven – Taiwan Semiconductor Resource Sharing Platform.”

⚠️ Safety and Usage Notes

• Users must complete instrument training and obtain authorization before operation.
• Follow all center safety regulations and standard operating procedures (SOPs).
• Stop operation immediately and notify the manager if any abnormal condition occurs.
• Users must bring their own probes.
• Refer to the Operation Manual for detailed procedures.