Dear Professors and Users,
Please be informed that the Center’s Plasma-Enhanced Atomic Layer Deposition (PEALD) system is scheduled to be shut down for maintenance from August 24 to September 11. The maintenance schedule may be adjusted depending on the actual circumstances.
For users who require oxide deposition during this period, the Thermal Atomic Layer Deposition (Thermal ALD) system may be used as an alternative.
We sincerely apologize for any inconvenience this maintenance may cause. Should you have any questions or require further information, please feel free to contact the Center staff at any time.
Thank you for your understanding and cooperation.